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Vol. 9, no. 1 (Jan./Feb. 1991)-. -- American Institute of Physics, 1991. <SB00018883>

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Vol. 9, no. 1 (Jan./Feb. 1991)-. -- American Institute of Physics, 1991. <SB00018883>

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No.	Library	Location	Location2	Call No	Volume	Available Years/Months	Accession status	Alert
0001	SUL	SS B1F storage journals	SS stacks journals	423.88	9-31	1991-2013
0002	OITL	KK journals in the stack room	KK journals in the stack room	423.88	9-14, 18-28	1991-2010

title and author	Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
Volumes and Years of Serial	Vol. 9, no. 1 (Jan./Feb. 1991)-
publication,distribution,etc.,area	New York : American Institute of Physics , 1991-
physical description area	v. : ill. ; 29 cm
variant titles	表紙タイトル:Journal of vacuum science and technology. B, 2nd series. Nanotechnology & microelectronics: mateials, processing, mesurement, & phenomena
variant titles	背表紙タイトル:JVSTB, Nanotechnology & microelectronics
NCID	AA10804928
text language code	English
frequency of publication code	Bimonthly
ISSN	10711023
relation bibliography link	継続前誌 :Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society <SB00018882>